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- W2348513013 abstract "Aluminum doped zinc oxide(AZO) films were prepared on a glass substrate by a sol-gel dip-coating process.The phase,microstructure and electro-optical properties of AZO films were investigated by X-ray diffraction,field emission scanning electron microscope,four-probe resistance meter,Hall-effect tester and UV-visible-infrared spectrophotometer,respectively.The influence of heat treatment on the electro-optical properties of AZO films was also analyzed.The results show that the visible light transmittance of AZO films prepared by pulling for 10 times is 85%.The heat treatment is crucial for enhancing the electrical properties of AZO films,and the better electrical properties are obtained when AZO films are annealed in a mixed atmosphere of 5%H_2 and 95%N_2,compared to that with vacuum annealed or in air.The sheet resistance and resistivity of AZO films are 300 Ω/□ and 3.3×10~(-3)Ω·cm after annealed in a reducing atmosphere at 550℃ for 60 min." @default.
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- W2348513013 date "2015-01-01" @default.
- W2348513013 modified "2023-09-24" @default.
- W2348513013 title "Influence of Heat Treatment on Electro-optical Properties of Al-doped ZnO Thin Films Prepared by Sol-Gel Method" @default.
- W2348513013 hasPublicationYear "2015" @default.
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