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- W2348574004 abstract "The feedback electrostatic force of MEMS accelerometer can be equivalent as the composition of two forces:one is a negative force which is in direct proportion to the feedback voltage;the other part is a positive force which is in direct proportion to the feedback voltage and acted as a negative stiffness.This character lead to a result that the equivalent system transformer is changed with the input.The mathematic model of the open loop system and the effect of feedback electrostatic force on the system are analyzed.And then,the parameters of the mechanical rigidity and the compensation circuit are proposed for ensuring the dynamic performance of the system over full measuring range.Additionally,the specific parameters advanced above were selected and adjusted on the simulation of the dynamic performance through Matlab.Finally,from the experiment on two accelerometers with different stiffness and correction parameters,it is concluded that through increasing the stiffness in a small amount and designing appropriate correction parameters,the dynamic performance and stability of the system could be improved with the threshold being almost uninfluenced." @default.
- W2348574004 created "2016-06-24" @default.
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- W2348574004 date "2009-01-01" @default.
- W2348574004 modified "2023-09-26" @default.
- W2348574004 title "Analysis and optimization on dynamic characteristics and important parameters of force feedback accelerometer" @default.
- W2348574004 hasPublicationYear "2009" @default.
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