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- W2348919655 abstract "Ta ions extracted from a metal vapor v acuum arc ion source were implanted i nto H13steel with various ion flux densi-ties.Ta concentration depth profil e in H13steel was calculated accordi ng to ion range profile and sputterin g theory.Rutherford back scattering showed that the Ta concentration depth profile in H13ste el wider than that of theory calculation.The thickness of alloy layer about 80nm." @default.
- W2348919655 created "2016-06-24" @default.
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- W2348919655 date "2002-01-01" @default.
- W2348919655 modified "2023-09-23" @default.
- W2348919655 title "Rutherford Back Scattering Analysis of H13Steel Implanted by Ta Ions High Flux Densit ies" @default.
- W2348919655 hasPublicationYear "2002" @default.
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