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- W2348930650 abstract "The Si-based thin films with novel structure and photoluminescence (PL) emission wave length of 400nm were deposited using atmosphere plasma-enhanced chemical vapor deposition (APECVD). The wadding-like porous nanostructure silicon films were prepared with bias voltage, while the proportion of SiH4/H2/Ar gas mixture was 100∶1∶1. The plasma optical emission was recorded as 2.2eV by spectrometer and the surface pattern was investigated by scanning electron microscope (SEM). The experiment results show that bias voltage has a great effect on formation of the nanostructure in the film." @default.
- W2348930650 created "2016-06-24" @default.
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- W2348930650 date "2008-01-01" @default.
- W2348930650 modified "2023-09-22" @default.
- W2348930650 title "The Investigation of Depositing Si-based Thin Films with Nano Structure by Atmospheric Plasma-enhanced Chemical Vapor Deposition" @default.
- W2348930650 hasPublicationYear "2008" @default.
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