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- W2349110139 abstract "Hermetic packaging of resonant beam pressure sensors is described.Various factors affecting hermetic packaging are analyzed from every aspect, and solutions to overcome these effects are proposed in particular." @default.
- W2349110139 created "2016-06-24" @default.
- W2349110139 creator A5063344634 @default.
- W2349110139 date "2005-01-01" @default.
- W2349110139 modified "2023-09-30" @default.
- W2349110139 title "Hermetic Packaging Technology for Resonant Beam Pressure Sensors" @default.
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