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- W2349859681 abstract "NbN barrier layers with a thickness around 30nm were grown between Si(100)substrates and Cu in rf and dc magnetron sputtering system,respectively.The Cu/NbN/Si samples were annealed up to 700℃ under the protection of pure nitrogen gas.In order to investigate the effect of NbN sputtering method on NbN diffusion barrier performance in Cu metallization,4-point probe technique(FPP),atomic force microscopy(AFM),scanning electron microscope(SEM),X-ray diffractometry(XRD)and Auger electron spectroscopy(AES)were performed,respectively.It is found that the microstructure of NbN film is very sensitive to NbN sputtering method.The NbN film deposited in a dc magnetron sputtering system is crystalline phase but amorphous in a rf magnetron sputtering system.FPP、XRD、SEM and AES results after annealing show that amorphous NbN film is a better diffusion barrier against Cu diffusion even after being annealed at 700℃ for an hour." @default.
- W2349859681 created "2016-06-24" @default.
- W2349859681 creator A5044762478 @default.
- W2349859681 date "2010-01-01" @default.
- W2349859681 modified "2023-09-23" @default.
- W2349859681 title "Influence of Sputtering method on Microstructure and Thermal Stability of NbN Diffusion Barrier" @default.
- W2349859681 hasPublicationYear "2010" @default.
- W2349859681 type Work @default.
- W2349859681 sameAs 2349859681 @default.
- W2349859681 citedByCount "0" @default.
- W2349859681 crossrefType "journal-article" @default.
- W2349859681 hasAuthorship W2349859681A5044762478 @default.
- W2349859681 hasConcept C113196181 @default.
- W2349859681 hasConcept C121332964 @default.
- W2349859681 hasConcept C127413603 @default.
- W2349859681 hasConcept C159985019 @default.
- W2349859681 hasConcept C171250308 @default.
- W2349859681 hasConcept C185544564 @default.
- W2349859681 hasConcept C185592680 @default.
- W2349859681 hasConcept C19067145 @default.
- W2349859681 hasConcept C192562407 @default.
- W2349859681 hasConcept C22423302 @default.
- W2349859681 hasConcept C25442681 @default.
- W2349859681 hasConcept C26771246 @default.
- W2349859681 hasConcept C2777855556 @default.
- W2349859681 hasConcept C2778836790 @default.
- W2349859681 hasConcept C2779227376 @default.
- W2349859681 hasConcept C42360764 @default.
- W2349859681 hasConcept C43617362 @default.
- W2349859681 hasConcept C56052488 @default.
- W2349859681 hasConcept C59061564 @default.
- W2349859681 hasConcept C61427134 @default.
- W2349859681 hasConcept C8010536 @default.
- W2349859681 hasConcept C87976508 @default.
- W2349859681 hasConceptScore W2349859681C113196181 @default.
- W2349859681 hasConceptScore W2349859681C121332964 @default.
- W2349859681 hasConceptScore W2349859681C127413603 @default.
- W2349859681 hasConceptScore W2349859681C159985019 @default.
- W2349859681 hasConceptScore W2349859681C171250308 @default.
- W2349859681 hasConceptScore W2349859681C185544564 @default.
- W2349859681 hasConceptScore W2349859681C185592680 @default.
- W2349859681 hasConceptScore W2349859681C19067145 @default.
- W2349859681 hasConceptScore W2349859681C192562407 @default.
- W2349859681 hasConceptScore W2349859681C22423302 @default.
- W2349859681 hasConceptScore W2349859681C25442681 @default.
- W2349859681 hasConceptScore W2349859681C26771246 @default.
- W2349859681 hasConceptScore W2349859681C2777855556 @default.
- W2349859681 hasConceptScore W2349859681C2778836790 @default.
- W2349859681 hasConceptScore W2349859681C2779227376 @default.
- W2349859681 hasConceptScore W2349859681C42360764 @default.
- W2349859681 hasConceptScore W2349859681C43617362 @default.
- W2349859681 hasConceptScore W2349859681C56052488 @default.
- W2349859681 hasConceptScore W2349859681C59061564 @default.
- W2349859681 hasConceptScore W2349859681C61427134 @default.
- W2349859681 hasConceptScore W2349859681C8010536 @default.
- W2349859681 hasConceptScore W2349859681C87976508 @default.
- W2349859681 hasLocation W23498596811 @default.
- W2349859681 hasOpenAccess W2349859681 @default.
- W2349859681 hasPrimaryLocation W23498596811 @default.
- W2349859681 hasRelatedWork W131887393 @default.
- W2349859681 hasRelatedWork W1597377857 @default.
- W2349859681 hasRelatedWork W1607296694 @default.
- W2349859681 hasRelatedWork W1994720494 @default.
- W2349859681 hasRelatedWork W1996578973 @default.
- W2349859681 hasRelatedWork W2000870675 @default.
- W2349859681 hasRelatedWork W2026692085 @default.
- W2349859681 hasRelatedWork W2057000545 @default.
- W2349859681 hasRelatedWork W2060173567 @default.
- W2349859681 hasRelatedWork W2060742060 @default.
- W2349859681 hasRelatedWork W2098972615 @default.
- W2349859681 hasRelatedWork W2173976556 @default.
- W2349859681 hasRelatedWork W2244402960 @default.
- W2349859681 hasRelatedWork W2348769531 @default.
- W2349859681 hasRelatedWork W2384167933 @default.
- W2349859681 hasRelatedWork W2736671184 @default.
- W2349859681 hasRelatedWork W2933813960 @default.
- W2349859681 hasRelatedWork W2955816763 @default.
- W2349859681 hasRelatedWork W3206595186 @default.
- W2349859681 hasRelatedWork W2921393402 @default.
- W2349859681 isParatext "false" @default.
- W2349859681 isRetracted "false" @default.
- W2349859681 magId "2349859681" @default.
- W2349859681 workType "article" @default.