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- W2349911775 abstract "It is necessary to explore the means of fabrication and processing technique of ceramics which are attractive and important materials for harsh-environment MEMS applications,such as high temperature and corrosive media.This paper reports emphatically a kind of new fabrication technique of ceramic MEMS-fabricating ceramic MEMS by pyrolysis convession of pre-ceramic polymers based on a simple review of the limits of traditional fabrication techniques for MEMS.The processing scheme,advantages and disadvantages of this technique and the developing direction in the future are also discussed in great detail." @default.
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- W2349911775 date "2007-01-01" @default.
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- W2349911775 title "Fabrication of Ceramic MEMS by Pyrolysis Conversion of Pre-Ceramic Polymers" @default.
- W2349911775 hasPublicationYear "2007" @default.
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