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- W2350233721 abstract "Soft lithography represents a patterns replicable strategy based on an elastic stamp/mold with surface patterned relief structures for transferring patterns. As a non-photolithographic technique for carrying out nano- and micro-fabrication, soft lithography can generate patterns and structures with feature sizes ranging from 5 nm to 100μm. It overcomes difficulties that the traditional photolithography encounters and provides a convenient, effective, low-cost method for the formation and manufacturing of micro- and nano-structures on planar or non-planar substrates. We discuss the principles of three primary techniques (microcontact printing (μCP), near-field photolithography(NFP), nano-imprinting lithography (NIL)), their procedures and problems they face, and introduce their applications in micro- and nano-fabrication, microelectronics, materials science, optics, MEMS, and surface chemistry." @default.
- W2350233721 created "2016-06-24" @default.
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- W2350233721 date "2003-01-01" @default.
- W2350233721 modified "2023-09-26" @default.
- W2350233721 title "Soft lithography technology and applications" @default.
- W2350233721 hasPublicationYear "2003" @default.
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