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- W2350721989 abstract "The resistivity of epi-layers on Si is one of the important characteristics of epi-wafers.To measure this value accurately, some measures should be taken. Four methods currently used in the measurement are compared. Their advantages and disadvantages are pointed out. In light of the problems with different methods, corresponding measures are taken. Experiments and analysis show good conformity is obtainable with different measurements, and relative measurement errors can be limited within 5%, satisfying the accuracy requirement for device fabrication." @default.
- W2350721989 created "2016-06-24" @default.
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- W2350721989 date "1996-01-01" @default.
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- W2350721989 title "A Study on the Conformity of the Resistivity Measurements of Epi-Layers on Silicon" @default.
- W2350721989 hasPublicationYear "1996" @default.
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