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- W2351040290 abstract "A wet etching process for backside via holes suitable for use on InP MMICs technologies is developed for indium phosphide substrate.PMMA is used to mount InP wafer onto glass carrier.Spattered Ta film is utilized as etch mask.HCl+H 3PO 4 solution realised a etch until a depth of 100μm.It is demonstrated that the wet etching backside process is controllable with large latitudes." @default.
- W2351040290 created "2016-06-24" @default.
- W2351040290 creator A5038800544 @default.
- W2351040290 date "2001-01-01" @default.
- W2351040290 modified "2023-09-25" @default.
- W2351040290 title "A Practical Backside Technology for Indium Phosphide MMICs" @default.
- W2351040290 hasPublicationYear "2001" @default.
- W2351040290 type Work @default.
- W2351040290 sameAs 2351040290 @default.
- W2351040290 citedByCount "0" @default.
- W2351040290 crossrefType "journal-article" @default.
- W2351040290 hasAuthorship W2351040290A5038800544 @default.
- W2351040290 hasConcept C100460472 @default.
- W2351040290 hasConcept C111368507 @default.
- W2351040290 hasConcept C127313418 @default.
- W2351040290 hasConcept C1291036 @default.
- W2351040290 hasConcept C160671074 @default.
- W2351040290 hasConcept C171250308 @default.
- W2351040290 hasConcept C192562407 @default.
- W2351040290 hasConcept C2776152967 @default.
- W2351040290 hasConcept C2777289219 @default.
- W2351040290 hasConcept C2779227376 @default.
- W2351040290 hasConcept C49040817 @default.
- W2351040290 hasConcept C510052550 @default.
- W2351040290 hasConcept C543292547 @default.
- W2351040290 hasConceptScore W2351040290C100460472 @default.
- W2351040290 hasConceptScore W2351040290C111368507 @default.
- W2351040290 hasConceptScore W2351040290C127313418 @default.
- W2351040290 hasConceptScore W2351040290C1291036 @default.
- W2351040290 hasConceptScore W2351040290C160671074 @default.
- W2351040290 hasConceptScore W2351040290C171250308 @default.
- W2351040290 hasConceptScore W2351040290C192562407 @default.
- W2351040290 hasConceptScore W2351040290C2776152967 @default.
- W2351040290 hasConceptScore W2351040290C2777289219 @default.
- W2351040290 hasConceptScore W2351040290C2779227376 @default.
- W2351040290 hasConceptScore W2351040290C49040817 @default.
- W2351040290 hasConceptScore W2351040290C510052550 @default.
- W2351040290 hasConceptScore W2351040290C543292547 @default.
- W2351040290 hasLocation W23510402901 @default.
- W2351040290 hasOpenAccess W2351040290 @default.
- W2351040290 hasPrimaryLocation W23510402901 @default.
- W2351040290 hasRelatedWork W1543078488 @default.
- W2351040290 hasRelatedWork W1834014713 @default.
- W2351040290 hasRelatedWork W1994229930 @default.
- W2351040290 hasRelatedWork W2080746374 @default.
- W2351040290 hasRelatedWork W2083989815 @default.
- W2351040290 hasRelatedWork W2095096636 @default.
- W2351040290 hasRelatedWork W2126154063 @default.
- W2351040290 hasRelatedWork W2145430775 @default.
- W2351040290 hasRelatedWork W2539256223 @default.
- W2351040290 hasRelatedWork W2399115491 @default.
- W2351040290 hasRelatedWork W2399718687 @default.
- W2351040290 hasRelatedWork W2524975654 @default.
- W2351040290 hasRelatedWork W2605371933 @default.
- W2351040290 hasRelatedWork W2770408281 @default.
- W2351040290 hasRelatedWork W2814339028 @default.
- W2351040290 hasRelatedWork W2827672906 @default.
- W2351040290 hasRelatedWork W2828235794 @default.
- W2351040290 hasRelatedWork W2848294863 @default.
- W2351040290 hasRelatedWork W2923417708 @default.
- W2351040290 hasRelatedWork W8864547 @default.
- W2351040290 isParatext "false" @default.
- W2351040290 isRetracted "false" @default.
- W2351040290 magId "2351040290" @default.
- W2351040290 workType "article" @default.