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- W2351605075 abstract "An amorphous Ti-Al film,on which Cu film was in situ prepared,was deposited on the Si(100) substrate by radio frequency(RF) magnetron sputtering to fabricate Cu(100 nm)/Ti-Al(40 nm)/Si samples.The samples were annealed in the temperature range from 400 ℃ to 800 ℃ in high vacuum and then characterized by atom force microscopy(AFM),X-ray diffraction(XRD),and four-point probe methods.The results show that,when the annealing temperature was below 750 ℃,the sample surface was smooth,and the surface root mean square roughness(Rms) and sheet resistance were smaller and did not change with the annealing temperature,and the amorphous Ti-Al film could prevent the interdiffusion between Cu and Si.However,for the sample annealed at 800 ℃,the surace root mean square roughness and sheet resistance increased dramatically,and Ti-Al film could not be used as an effective barrier anymore." @default.
- W2351605075 created "2016-06-24" @default.
- W2351605075 creator A5058009019 @default.
- W2351605075 date "2009-01-01" @default.
- W2351605075 modified "2023-09-25" @default.
- W2351605075 title "Ti-Al Film Used as Diffusion Barrier for Copper Interconnection Deposited by RF Magnetron Sputtering" @default.
- W2351605075 hasPublicationYear "2009" @default.
- W2351605075 type Work @default.
- W2351605075 sameAs 2351605075 @default.
- W2351605075 citedByCount "0" @default.
- W2351605075 crossrefType "journal-article" @default.
- W2351605075 hasAuthorship W2351605075A5058009019 @default.
- W2351605075 hasConcept C107365816 @default.
- W2351605075 hasConcept C113196181 @default.
- W2351605075 hasConcept C119599485 @default.
- W2351605075 hasConcept C123408415 @default.
- W2351605075 hasConcept C127413603 @default.
- W2351605075 hasConcept C159985019 @default.
- W2351605075 hasConcept C171250308 @default.
- W2351605075 hasConcept C185592680 @default.
- W2351605075 hasConcept C19067145 @default.
- W2351605075 hasConcept C191897082 @default.
- W2351605075 hasConcept C192562407 @default.
- W2351605075 hasConcept C22423302 @default.
- W2351605075 hasConcept C2777855556 @default.
- W2351605075 hasConcept C2778836790 @default.
- W2351605075 hasConcept C2779227376 @default.
- W2351605075 hasConcept C43617362 @default.
- W2351605075 hasConcept C544778455 @default.
- W2351605075 hasConcept C56052488 @default.
- W2351605075 hasConcept C61427134 @default.
- W2351605075 hasConcept C66825105 @default.
- W2351605075 hasConcept C71039073 @default.
- W2351605075 hasConcept C71907059 @default.
- W2351605075 hasConcept C8010536 @default.
- W2351605075 hasConceptScore W2351605075C107365816 @default.
- W2351605075 hasConceptScore W2351605075C113196181 @default.
- W2351605075 hasConceptScore W2351605075C119599485 @default.
- W2351605075 hasConceptScore W2351605075C123408415 @default.
- W2351605075 hasConceptScore W2351605075C127413603 @default.
- W2351605075 hasConceptScore W2351605075C159985019 @default.
- W2351605075 hasConceptScore W2351605075C171250308 @default.
- W2351605075 hasConceptScore W2351605075C185592680 @default.
- W2351605075 hasConceptScore W2351605075C19067145 @default.
- W2351605075 hasConceptScore W2351605075C191897082 @default.
- W2351605075 hasConceptScore W2351605075C192562407 @default.
- W2351605075 hasConceptScore W2351605075C22423302 @default.
- W2351605075 hasConceptScore W2351605075C2777855556 @default.
- W2351605075 hasConceptScore W2351605075C2778836790 @default.
- W2351605075 hasConceptScore W2351605075C2779227376 @default.
- W2351605075 hasConceptScore W2351605075C43617362 @default.
- W2351605075 hasConceptScore W2351605075C544778455 @default.
- W2351605075 hasConceptScore W2351605075C56052488 @default.
- W2351605075 hasConceptScore W2351605075C61427134 @default.
- W2351605075 hasConceptScore W2351605075C66825105 @default.
- W2351605075 hasConceptScore W2351605075C71039073 @default.
- W2351605075 hasConceptScore W2351605075C71907059 @default.
- W2351605075 hasConceptScore W2351605075C8010536 @default.
- W2351605075 hasLocation W23516050751 @default.
- W2351605075 hasOpenAccess W2351605075 @default.
- W2351605075 hasPrimaryLocation W23516050751 @default.
- W2351605075 hasRelatedWork W1042859384 @default.
- W2351605075 hasRelatedWork W1603806197 @default.
- W2351605075 hasRelatedWork W1675398888 @default.
- W2351605075 hasRelatedWork W2002189376 @default.
- W2351605075 hasRelatedWork W2022820392 @default.
- W2351605075 hasRelatedWork W2029415011 @default.
- W2351605075 hasRelatedWork W2038629431 @default.
- W2351605075 hasRelatedWork W2044095386 @default.
- W2351605075 hasRelatedWork W2070102235 @default.
- W2351605075 hasRelatedWork W2093665218 @default.
- W2351605075 hasRelatedWork W2093877786 @default.
- W2351605075 hasRelatedWork W2113727561 @default.
- W2351605075 hasRelatedWork W2114313663 @default.
- W2351605075 hasRelatedWork W2390276853 @default.
- W2351605075 hasRelatedWork W2415903076 @default.
- W2351605075 hasRelatedWork W2472945880 @default.
- W2351605075 hasRelatedWork W2802121677 @default.
- W2351605075 hasRelatedWork W2887035545 @default.
- W2351605075 hasRelatedWork W2891946222 @default.
- W2351605075 hasRelatedWork W2095329522 @default.
- W2351605075 isParatext "false" @default.
- W2351605075 isRetracted "false" @default.
- W2351605075 magId "2351605075" @default.
- W2351605075 workType "article" @default.