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- W2352034259 abstract "According to unique complicated features,this paper proposed a real-time scheduling simulation platform for the semiconductor wafer fabrication system(SWFS) with object-oriented technology.Based on the high-fidelity system model established by an extended object-oriented Petri net(EOPN) modeling mechanism,the simulation platform may not only simulate the complex wafer fabrication process,but also be able to integrate various types of real-time scheduling and dispatching policies,and compute,test and evaluate corresponding system performance.The development of simulation platform provides positive support for related research of modeling,schedule and control in the semiconductor manufacturing field." @default.
- W2352034259 created "2016-06-24" @default.
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- W2352034259 date "2006-01-01" @default.
- W2352034259 modified "2023-09-25" @default.
- W2352034259 title "An EOPN-Based Real-Time Scheduling Simulation Platform of Wafer Fabrication System" @default.
- W2352034259 hasPublicationYear "2006" @default.
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