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- W2352362022 abstract "The research on plasma devices under higher pressure has not been developed deeply.We introduces a new microwave plasma generator,which can excite plasma by the function of slot antennae and an extra slot on the inwall of the ring waveguide around the cavity.This structure with two different kinds of slot can expand the area of high electric field,benefiting the production of large area plasma.Moreover,an air-blast ionization jet is supported to help reduce the microwave power input on plasma exciting by the effect of ionization stream.We present the structure and design of the generator,compare the generator with common narrow slots antenna cavity to show the advantages,and show the function of ionization jet by analyzing the change of the power input with or without the ionization stream.Through the appearance observed by the camera,homogenous plasma with large area can be produced at one atmospheric pressure." @default.
- W2352362022 created "2016-06-24" @default.
- W2352362022 creator A5019381489 @default.
- W2352362022 date "2009-01-01" @default.
- W2352362022 modified "2023-09-24" @default.
- W2352362022 title "A Microwave Plasma System with Ring Waveguide" @default.
- W2352362022 hasPublicationYear "2009" @default.
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