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- W2352495422 abstract "GeSb2Te4 films were deposited on Si substrates by RF magnetron sputtering,and the effects of sputtering power on the surface topography and anti-compression properties were studied with atomic force microscope(AFM)and nanoindenter.Meanwhile,the mechanical properties of GeSb2Te4 films with oxygen impurity were also investigated.The results indicate that proper sputtering power is important for obtaining GeSb2Te4 films with high compact structure and low surface roughness,which present good load-support capacity.Although the effect of oxygen impurity on the anti-compression properties of GeSb2Te4 films is not very significant as a whole,certain oxygen dosage can relax the internal stress,thereby the hardness of the films drops slightly." @default.
- W2352495422 created "2016-06-24" @default.
- W2352495422 creator A5063507086 @default.
- W2352495422 date "2008-01-01" @default.
- W2352495422 modified "2023-09-26" @default.
- W2352495422 title "Influence of sputtering parameters on microstructure and mechanical properties of GeSbTe films" @default.
- W2352495422 hasPublicationYear "2008" @default.
- W2352495422 type Work @default.
- W2352495422 sameAs 2352495422 @default.
- W2352495422 citedByCount "0" @default.
- W2352495422 crossrefType "journal-article" @default.
- W2352495422 hasAuthorship W2352495422A5063507086 @default.
- W2352495422 hasConcept C102951782 @default.
- W2352495422 hasConcept C107365816 @default.
- W2352495422 hasConcept C159985019 @default.
- W2352495422 hasConcept C171250308 @default.
- W2352495422 hasConcept C178790620 @default.
- W2352495422 hasConcept C185592680 @default.
- W2352495422 hasConcept C19067145 @default.
- W2352495422 hasConcept C192562407 @default.
- W2352495422 hasConcept C22423302 @default.
- W2352495422 hasConcept C2780569836 @default.
- W2352495422 hasConcept C49040817 @default.
- W2352495422 hasConcept C49326732 @default.
- W2352495422 hasConcept C540031477 @default.
- W2352495422 hasConcept C61427134 @default.
- W2352495422 hasConcept C71039073 @default.
- W2352495422 hasConcept C71987851 @default.
- W2352495422 hasConcept C87976508 @default.
- W2352495422 hasConceptScore W2352495422C102951782 @default.
- W2352495422 hasConceptScore W2352495422C107365816 @default.
- W2352495422 hasConceptScore W2352495422C159985019 @default.
- W2352495422 hasConceptScore W2352495422C171250308 @default.
- W2352495422 hasConceptScore W2352495422C178790620 @default.
- W2352495422 hasConceptScore W2352495422C185592680 @default.
- W2352495422 hasConceptScore W2352495422C19067145 @default.
- W2352495422 hasConceptScore W2352495422C192562407 @default.
- W2352495422 hasConceptScore W2352495422C22423302 @default.
- W2352495422 hasConceptScore W2352495422C2780569836 @default.
- W2352495422 hasConceptScore W2352495422C49040817 @default.
- W2352495422 hasConceptScore W2352495422C49326732 @default.
- W2352495422 hasConceptScore W2352495422C540031477 @default.
- W2352495422 hasConceptScore W2352495422C61427134 @default.
- W2352495422 hasConceptScore W2352495422C71039073 @default.
- W2352495422 hasConceptScore W2352495422C71987851 @default.
- W2352495422 hasConceptScore W2352495422C87976508 @default.
- W2352495422 hasLocation W23524954221 @default.
- W2352495422 hasOpenAccess W2352495422 @default.
- W2352495422 hasPrimaryLocation W23524954221 @default.
- W2352495422 hasRelatedWork W1973132329 @default.
- W2352495422 hasRelatedWork W1979406721 @default.
- W2352495422 hasRelatedWork W1991682363 @default.
- W2352495422 hasRelatedWork W1997898669 @default.
- W2352495422 hasRelatedWork W2003017522 @default.
- W2352495422 hasRelatedWork W2035218032 @default.
- W2352495422 hasRelatedWork W2036210010 @default.
- W2352495422 hasRelatedWork W2050136723 @default.
- W2352495422 hasRelatedWork W2053989137 @default.
- W2352495422 hasRelatedWork W2060294908 @default.
- W2352495422 hasRelatedWork W2065471610 @default.
- W2352495422 hasRelatedWork W2085843349 @default.
- W2352495422 hasRelatedWork W2095253407 @default.
- W2352495422 hasRelatedWork W2347449281 @default.
- W2352495422 hasRelatedWork W2372860780 @default.
- W2352495422 hasRelatedWork W2393115808 @default.
- W2352495422 hasRelatedWork W2467009620 @default.
- W2352495422 hasRelatedWork W2528489131 @default.
- W2352495422 hasRelatedWork W2913900840 @default.
- W2352495422 hasRelatedWork W3082443712 @default.
- W2352495422 isParatext "false" @default.
- W2352495422 isRetracted "false" @default.
- W2352495422 magId "2352495422" @default.
- W2352495422 workType "article" @default.