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- W2352912184 abstract "Abrasive particle is a very important component of the chemical mechanical polishing(CMP) system.The paper addresses the effects of abrasive particle size and concentration within the CMP process based on a molecular-scale removal model.The paper also considers the effects of the polishing pad.The proposed model based on the contact mechanics and probability statistics predicts a nonlinear dependence of removal rate on particle size and concentration,which is in good agreement with the trend observed experimentally.The study also deepens a understanding of the effects of the abrasive particles size and concentration." @default.
- W2352912184 created "2016-06-24" @default.
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- W2352912184 date "2007-01-01" @default.
- W2352912184 modified "2023-09-24" @default.
- W2352912184 title "Modeling of Chemical Mechanical Polishing Material Removal Based on Molecular-Scale Mechanism" @default.
- W2352912184 hasPublicationYear "2007" @default.
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