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- W2352926445 abstract "In this paper,a novel method for the analysis of switching time and dynamic be- havior of the electrostatic driven RF MEMS capacitive switches applied to microwave distributed MEMS phase shifters is presented.The effects of the materials,the driven voltage,the air gap height,and the width of the CPW signal line on the switching time are investigated using the SYNPLE module of IntelliSuite~(TM) simulation tool.By the optimization of parameters,the results demonstrated that for Au MEMS capacitive switches,V=40 V,g_0=2.5μm,and W=100μm, the switching time of switches is～7μs." @default.
- W2352926445 created "2016-06-24" @default.
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- W2352926445 date "2007-01-01" @default.
- W2352926445 modified "2023-09-25" @default.
- W2352926445 title "Time Response Characteristic Investigation of the Capacitive Switches for Distributed MEMS Phase Shifters" @default.
- W2352926445 hasPublicationYear "2007" @default.
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