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- W2353008794 abstract "A series of samples with different Cr concentration of Cr-doped GLC coatings deposited on single crystal silicon substrates by unbalanced magnetron sputtering ion plating technique were prepared by adjusting sputtering power of Chromium target.Microstructure of Cr-GLC coatings was investigated by Raman spectrum,X-ray photoelectron spectrometer(XPS),transmission electronic microscope (TEM),and microhardness was measured by microhardness tester.The results showed that hardness of Cr-GLC coatings gradually decreases with increase of Cr content and tends to a stable value.Chromium noncrystals occur in amorphous GLC coatings when Cr content is below 4%,and chromium doping results in inner stress decrease.CrC_xnanocrystals also occur in amorphous GLC coatings when Cr content is above 4%.The amorphous coatings are composed of C,Cr and CrC_xnanocrystals." @default.
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- W2353008794 date "2009-01-01" @default.
- W2353008794 modified "2023-09-25" @default.
- W2353008794 title "Analysis of Structure of Cr-doped GLC Coatings Deposited by Unbalanced Magnetron Sputtering" @default.
- W2353008794 hasPublicationYear "2009" @default.
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