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- W2353234538 abstract "A four cantilever-mass accelerometer was designed by using the Metal-Semiconductor injunction Field Effect Transistors(MESFETs) as the sensitivity unites.Through the ANSYS analysis software,the MESFETs were located at the maximum stress point near the root of the cantilevers to obtain high sensitivity.The output characteristics of the packaged accelerometer at different accelerations were researched by using the Wheatstone bridge,and the electromechanical coupling effect was validated.The testing results indicate that the linearity of the accelerometer is well,its measurement range can achieve 24 g, and the sensitivity is 4.5 mV/g at saturation region.The research is of great significance for the development of the high-sensitivity micro-sensor." @default.
- W2353234538 created "2016-06-24" @default.
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- W2353234538 date "2010-01-01" @default.
- W2353234538 modified "2023-09-23" @default.
- W2353234538 title "Design and Testing on GaAs Micro-Accelerometer Based on MESFET" @default.
- W2353234538 hasPublicationYear "2010" @default.
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