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- W2353281383 abstract "In order to characterize the structure of a Mo/Si multilayer,the Small Angle X-ray Diffraction(SAXD) of a multilayer sample is measured and the analytical methods of SAXD data were introduced,including Bragg peak fitting,Fourier transform,and X-ray diffraction fitting.The period thickness of the multilayer obtained by the Bragg peak fitting or X-ray diffraction curve fitting is 7.09 nm.The interface roughness(interdiffusion length) are 0.40-0.41 nm(Si on Mo) and 0.52-0.70 nm(Mo on Si),respectively.And the former is smaller than latter,which is consistent with the Transmisson Electron Microscopy(TEM) results in 0.40 nm(Si on Mo) and 0.6-0.65 nm(Mo on Si).Meanwhile,the refractive profile extracted by the X-ray diffraction fitting with a diffusion model is also consistent with the gray-scale profile by integrated High Resolution TEM(HRTEM).By the comprehensive characterization of the X-ray diffractometry(XRD) and TEM,the fine structural information of the Mo/Si multilayer is obtained,which is critical for the technology optimization of the multilayer deposition." @default.
- W2353281383 created "2016-06-24" @default.
- W2353281383 creator A5055813460 @default.
- W2353281383 date "2010-01-01" @default.
- W2353281383 modified "2023-09-27" @default.
- W2353281383 title "Structural characterization of Mo/Si multilayer by grazing incidence X-ray diffraction" @default.
- W2353281383 hasPublicationYear "2010" @default.
- W2353281383 type Work @default.
- W2353281383 sameAs 2353281383 @default.
- W2353281383 citedByCount "0" @default.
- W2353281383 crossrefType "journal-article" @default.
- W2353281383 hasAuthorship W2353281383A5055813460 @default.
- W2353281383 hasConcept C113196181 @default.
- W2353281383 hasConcept C120665830 @default.
- W2353281383 hasConcept C121332964 @default.
- W2353281383 hasConcept C146088050 @default.
- W2353281383 hasConcept C161368742 @default.
- W2353281383 hasConcept C171250308 @default.
- W2353281383 hasConcept C185592680 @default.
- W2353281383 hasConcept C192562407 @default.
- W2353281383 hasConcept C207114421 @default.
- W2353281383 hasConcept C2779328170 @default.
- W2353281383 hasConcept C2780841128 @default.
- W2353281383 hasConcept C43617362 @default.
- W2353281383 hasConcept C50515024 @default.
- W2353281383 hasConceptScore W2353281383C113196181 @default.
- W2353281383 hasConceptScore W2353281383C120665830 @default.
- W2353281383 hasConceptScore W2353281383C121332964 @default.
- W2353281383 hasConceptScore W2353281383C146088050 @default.
- W2353281383 hasConceptScore W2353281383C161368742 @default.
- W2353281383 hasConceptScore W2353281383C171250308 @default.
- W2353281383 hasConceptScore W2353281383C185592680 @default.
- W2353281383 hasConceptScore W2353281383C192562407 @default.
- W2353281383 hasConceptScore W2353281383C207114421 @default.
- W2353281383 hasConceptScore W2353281383C2779328170 @default.
- W2353281383 hasConceptScore W2353281383C2780841128 @default.
- W2353281383 hasConceptScore W2353281383C43617362 @default.
- W2353281383 hasConceptScore W2353281383C50515024 @default.
- W2353281383 hasLocation W23532813831 @default.
- W2353281383 hasOpenAccess W2353281383 @default.
- W2353281383 hasPrimaryLocation W23532813831 @default.
- W2353281383 hasRelatedWork W1591867947 @default.
- W2353281383 hasRelatedWork W1645358226 @default.
- W2353281383 hasRelatedWork W1967440602 @default.
- W2353281383 hasRelatedWork W1995351041 @default.
- W2353281383 hasRelatedWork W2008810257 @default.
- W2353281383 hasRelatedWork W2009875767 @default.
- W2353281383 hasRelatedWork W2026625666 @default.
- W2353281383 hasRelatedWork W2042003498 @default.
- W2353281383 hasRelatedWork W2046536825 @default.
- W2353281383 hasRelatedWork W2055115481 @default.
- W2353281383 hasRelatedWork W2070407544 @default.
- W2353281383 hasRelatedWork W2071526505 @default.
- W2353281383 hasRelatedWork W2348050764 @default.
- W2353281383 hasRelatedWork W2365816563 @default.
- W2353281383 hasRelatedWork W2400460278 @default.
- W2353281383 hasRelatedWork W2604618169 @default.
- W2353281383 hasRelatedWork W2748725985 @default.
- W2353281383 hasRelatedWork W2808309976 @default.
- W2353281383 hasRelatedWork W3146212080 @default.
- W2353281383 hasRelatedWork W3151303237 @default.
- W2353281383 isParatext "false" @default.
- W2353281383 isRetracted "false" @default.
- W2353281383 magId "2353281383" @default.
- W2353281383 workType "article" @default.