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- W2353352775 abstract "The influence of residual charges in insulator of cantilever structure on its mechanical parameters when using pull in method was analyzed. A novel method for evaluating the amount of residual charges was proposed using C V curves of cantilever. The calculated residual charges were considered as an equivalent effect on the structure with static electro forces. So, the error of residual charges on mechanical parameters can be deduced. This method is suitable for improving the precision of mechanical parameters and also can be used on the analysis of static electro actuators." @default.
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- W2353352775 date "2003-01-01" @default.
- W2353352775 modified "2023-09-24" @default.
- W2353352775 title "Analysis of error induced by residual charges in mechanical parameters" @default.
- W2353352775 hasPublicationYear "2003" @default.
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