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- W2353408046 abstract "A high performance secondary ion analyzing system for SIMS is described in this paper. A retarding-accelerating energy analyzer and a large channeltron are incorporated into a quadrupole-bascd system. The high performance has been achieved by careful calculation of the ion trajectories, close attention to the design of the ion optics and serial experimental studies. The performance has been examined with a thermal Na~+ source. The minimum energy bandwidth could by decreased down to 0.4eV(FWHM), which is near to the dispersion of the Na~+ source. The transmission of the whole system (the ratio of the detected ions to the entrant ions) was found to be 3% at △Mlamu(△M at 5% peak height) and under a wider energy bandwidth. The experimental results show that the system can be used to carry out high sensitivity SIMS work as well as secondary ion energy spectrum studies." @default.
- W2353408046 created "2016-06-24" @default.
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- W2353408046 date "1986-01-01" @default.
- W2353408046 modified "2023-09-26" @default.
- W2353408046 title "A HIGH PERFORMANCE SECONDARY ION ANALYZING SYSTEM" @default.
- W2353408046 hasPublicationYear "1986" @default.
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