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- W2353509754 abstract "The production line of semiconductor is the most complicated manufacturing system recognized world-wide,and etching equipment is the most complicated system in manufacture of semiconductor wafer.And dispatching algorithm of etching equipment is the core of system production control and management.At present,the most research are directed to task dispatching in level fab domestically,few of them are directed to etching equipment alone.In this,the author puts forward a rule-based real-time wafer dispatching algorithm,strive to shorten the production cycle and improve equipment capacity." @default.
- W2353509754 created "2016-06-24" @default.
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- W2353509754 date "2012-01-01" @default.
- W2353509754 modified "2023-09-23" @default.
- W2353509754 title "The research of semiconductor manufacture etching equipment dispatching algorithm" @default.
- W2353509754 hasPublicationYear "2012" @default.
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