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- W2353618219 abstract "The fast development of microelectronics has been making sensors based on silicon developing toward integration,microsize and mass production.To the chip integrated with pH-ISFET,fabricating excellent pH functional membrane with MEMS processes is the key factors in development.Fabricating pH sensitive membrane was with MEMS processes,On the base of small size integration chip,Ta2O5 membrane was fabricated as pH sensitive material,and PTFE membrane as pH passive material.The sensitivity of the pH-ISFET with Ta2O5 membrane was 56 mV/pH,and the sensitivity of the REFET with PTFE membrane was only 0.13 mV/pH within the pH range from1 to 12.It's a feasible method to fabricating pH functional membrane with MEMS processes for full integration pH-ISFET chip." @default.
- W2353618219 created "2016-06-24" @default.
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- W2353618219 date "2007-01-01" @default.
- W2353618219 modified "2023-09-23" @default.
- W2353618219 title "Development of Functional Membranes for pH-ISFET/REFET with MEMS Processes" @default.
- W2353618219 hasPublicationYear "2007" @default.
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