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- W2353821000 abstract "Dielectric properties of HfO 2 films deposited on compressively strained Si 83 Ge 17 /Si substrate by using radiofrequency magnetron sputtering have been investigated.It is demonstrated that the as-deposited HfO 2 films has monoclinic crystalline structure and the measured permittivity shows no remarkable frequency dependence(~23.8 at 1 MHz).Comparison experiment reveals that under the same optimized conditions(room temperature growth in 3 Pa Ar ambient with working power of 70 W and thermal annealing treatment in N 2 atmosphere at 350°C for 30 min),dielectric properties of the HfO 2 films on Si 83 Ge 17 /Si(100) substrate are better than that on Si(100) substrate,such as relatively large accumulation capacitance,low leakage current density(2.51×10 5 A cm 2 at 1 V gate voltage),lowe flat band voltage(0.06 V),and smaller hysteresis of capacitance-voltage curves.It is argued that compressively strained Si 83 Ge 17 buffer layer depresses interfacial reaction between HfO 2 and Si,and results in improved dielectric properties of the HfO 2 films on Si 83 Ge 17 /Si substrate." @default.
- W2353821000 created "2016-06-24" @default.
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- W2353821000 date "2012-01-01" @default.
- W2353821000 modified "2023-09-23" @default.
- W2353821000 title "Dielectric properties of HfO_2 films deposited on compressively strained Si_(83)Ge_(17)/Si substrate by sputtering" @default.
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