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- W2353830568 abstract "The dynamic response of the package structure for a high -g MEMS accelerometer with double cantilever beams under high -g shock acceleration was simulated using finite element method.By applying half sine pulse of accele ration with 100,000g' s peak,it is found that the effect of modulus of encapsulant on the simula ted output voltage and beam deflection can be ignored.The peak value of output voltage is close to th e analytic solution.The cantilever beams of accelerometer behave as forced vibration,with the cantilever beams ' natural characteristic frequency u nder damping.But the peak values of output voltage and beam deflection show good linearity with peak acceleration applied.Encapsulant with elastic modulus above 4GPa is rigid enough to e ncapsulate the chip." @default.
- W2353830568 created "2016-06-24" @default.
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- W2353830568 date "2004-01-01" @default.
- W2353830568 modified "2023-09-25" @default.
- W2353830568 title "Dynamic response of plastic encapsu lated high -g MEMS accelerometer" @default.
- W2353830568 hasPublicationYear "2004" @default.
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