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- W2354291683 abstract "The effect of imidazole(C3H4N2) concentration and pH value on the material removal rate(MRR) in H3PO4 slurries was investigated.The effect of inhibiter on the corrosion behavior was investigated by electrochemical methods and X-ray photoelectron spectroscopy(XPS).The surface roughness of the polished Ru disk was characterized by atomic force microscopy(AFM).The results show that the MRR can attain 6.2 nm/min and the surface roughness(Ra) of the polished Ru disk can reach 10.7 nm when Ru is in the H3PO4 slurries without imidazole.After adding imidazole,the MRR can reach 3.9 nm/min and Ra decreases to 1.0 nm.Imidazole can reduce the MRR of Ru,and obtain better surface quality.Polarization curves suggest that imidazole can promote the formation of the passive film on the surface of Ru,decrease the corrosion current and inhibit the cathode reaction." @default.
- W2354291683 created "2016-06-24" @default.
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- W2354291683 date "2013-01-01" @default.
- W2354291683 modified "2023-09-26" @default.
- W2354291683 title "Effect of Imidazole on the Chemical Mechanical Planarization of Ruthenium" @default.
- W2354291683 hasPublicationYear "2013" @default.
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