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- W2354292770 abstract "The principle of polarimetric interferometer used for nanopositioning was presented;and the displacement control method based on this polarimetric inerferometer was introduced.The proposed principle was set up.The practical minimal displacement step of our established system was 5 nm.The experimental results of this system including minimal step,repeatability and resolution were presented.Such a system can be used over milimeter range displacements in a controlled surrounding environement leading to numerous applications in nanometroloy and nanoprocessing." @default.
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- W2354292770 date "2009-01-01" @default.
- W2354292770 modified "2023-09-25" @default.
- W2354292770 title "Nanopositioning system based on polarimetric interferometer" @default.
- W2354292770 hasPublicationYear "2009" @default.
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