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- W2354660065 abstract "The dependence of the uniqueness in simultaneous determination of substrate optical parameters and film parameters by multiple angle of incidence ellipsometry on the correlation among these unknown parameters was discussed. A general guide to the selection of angle of incidence was proposed. The first derivatives of A and ψ with respect to ns, ks, nf, kf, d and angle of incidence 0 were computed for Si-SiO2 and stainless steel-passive film systems. The correlation among the unknown parameters was examined. A random simplex method was developed to obtain results lor these two systems." @default.
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- W2354660065 date "1989-01-01" @default.
- W2354660065 modified "2023-09-25" @default.
- W2354660065 title "SIMULTANEOUS DETERMINATION OF SUBSTRATEOPTICAL CONSTANTS AND FILM PARAMETERSBY MULTIPLE ANGLE OF INCIDENCEELLIPSOMETRY" @default.
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