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- W2354834276 abstract ": Amorphous silicon (a-Si) films are prepared at lower temperature (350 ℃) by new catalytic chemical vapor deposition (CVD) method.In the method gas mixture (SiH4 and H2)is decomposed by catalytic reaction at given temperature.As a result a-Si films are deposited on the substrates.It is found that a-Si films with good quality can be obtained with photosensitivity is excess of 106 and spin density as low as 2.5×1016 cm-3." @default.
- W2354834276 created "2016-06-24" @default.
- W2354834276 creator A5031374841 @default.
- W2354834276 date "1997-01-01" @default.
- W2354834276 modified "2023-09-25" @default.
- W2354834276 title "Preparation of amorphous silicon films by catalytic CVD" @default.
- W2354834276 hasPublicationYear "1997" @default.
- W2354834276 type Work @default.
- W2354834276 sameAs 2354834276 @default.
- W2354834276 citedByCount "0" @default.
- W2354834276 crossrefType "journal-article" @default.
- W2354834276 hasAuthorship W2354834276A5031374841 @default.
- W2354834276 hasConcept C127413603 @default.
- W2354834276 hasConcept C161790260 @default.
- W2354834276 hasConcept C171250308 @default.
- W2354834276 hasConcept C178790620 @default.
- W2354834276 hasConcept C185592680 @default.
- W2354834276 hasConcept C186807665 @default.
- W2354834276 hasConcept C192562407 @default.
- W2354834276 hasConcept C2776390347 @default.
- W2354834276 hasConcept C2779667780 @default.
- W2354834276 hasConcept C42360764 @default.
- W2354834276 hasConcept C49040817 @default.
- W2354834276 hasConcept C544956773 @default.
- W2354834276 hasConcept C56052488 @default.
- W2354834276 hasConcept C57410435 @default.
- W2354834276 hasConceptScore W2354834276C127413603 @default.
- W2354834276 hasConceptScore W2354834276C161790260 @default.
- W2354834276 hasConceptScore W2354834276C171250308 @default.
- W2354834276 hasConceptScore W2354834276C178790620 @default.
- W2354834276 hasConceptScore W2354834276C185592680 @default.
- W2354834276 hasConceptScore W2354834276C186807665 @default.
- W2354834276 hasConceptScore W2354834276C192562407 @default.
- W2354834276 hasConceptScore W2354834276C2776390347 @default.
- W2354834276 hasConceptScore W2354834276C2779667780 @default.
- W2354834276 hasConceptScore W2354834276C42360764 @default.
- W2354834276 hasConceptScore W2354834276C49040817 @default.
- W2354834276 hasConceptScore W2354834276C544956773 @default.
- W2354834276 hasConceptScore W2354834276C56052488 @default.
- W2354834276 hasConceptScore W2354834276C57410435 @default.
- W2354834276 hasLocation W23548342761 @default.
- W2354834276 hasOpenAccess W2354834276 @default.
- W2354834276 hasPrimaryLocation W23548342761 @default.
- W2354834276 hasRelatedWork W1968289598 @default.
- W2354834276 hasRelatedWork W1980214871 @default.
- W2354834276 hasRelatedWork W2008136245 @default.
- W2354834276 hasRelatedWork W2009996361 @default.
- W2354834276 hasRelatedWork W2015957150 @default.
- W2354834276 hasRelatedWork W2037899291 @default.
- W2354834276 hasRelatedWork W2056582154 @default.
- W2354834276 hasRelatedWork W2066021902 @default.
- W2354834276 hasRelatedWork W2069501585 @default.
- W2354834276 hasRelatedWork W2085072569 @default.
- W2354834276 hasRelatedWork W2100177262 @default.
- W2354834276 hasRelatedWork W2313120961 @default.
- W2354834276 hasRelatedWork W2318707146 @default.
- W2354834276 hasRelatedWork W2321994680 @default.
- W2354834276 hasRelatedWork W2360517534 @default.
- W2354834276 hasRelatedWork W2614662955 @default.
- W2354834276 hasRelatedWork W2914652488 @default.
- W2354834276 hasRelatedWork W2952260032 @default.
- W2354834276 hasRelatedWork W3024416690 @default.
- W2354834276 hasRelatedWork W3176322736 @default.
- W2354834276 isParatext "false" @default.
- W2354834276 isRetracted "false" @default.
- W2354834276 magId "2354834276" @default.
- W2354834276 workType "article" @default.