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- W2354846100 abstract "The turbo pump is a core component in the high vacuum system. By analyzing the structure of SB6 vacuum system and the feature of the turbo pump, the dissertation discusses three matters that probably make the turbo pump to be destroyed easily when doing bonding processes. The software adjustment, which increases the chamber pressure gradually and smoothly by editing the standard bonding program, is finally introduced to improve the gas inlet throughput when chamber purging. It is confident that the idea to protect the turbo pump mentioned in the dissertation will be helpful to those who are doing semiconductor technical service job." @default.
- W2354846100 created "2016-06-24" @default.
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- W2354846100 date "2007-01-01" @default.
- W2354846100 modified "2023-09-25" @default.
- W2354846100 title "Software Improvement at the Procedure of SB6 Chamber Purging" @default.
- W2354846100 hasPublicationYear "2007" @default.
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