Matches in SemOpenAlex for { <https://semopenalex.org/work/W2354890410> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W2354890410 abstract "Based on silicon micromachining technology, a novel deformable mirror with 30mm×30mm effective reflecting surface and 49 actuators is designed and fabricated. It is composed of a silicon membrane, at the back of which is attached by a 7×7 pillars array. The pillars and bonding part are fabricated through two etching steps with different depth. In terms of optimization, a 110 strip pattern is designed specially for the convex corner compensation during the etching process, and the anodic bonding process is performed under 0.2MPa atmospheric pressures." @default.
- W2354890410 created "2016-06-24" @default.
- W2354890410 creator A5040953644 @default.
- W2354890410 date "2004-01-01" @default.
- W2354890410 modified "2023-09-23" @default.
- W2354890410 title "Novel deformable mirror based on silicon micromachining technology" @default.
- W2354890410 hasPublicationYear "2004" @default.
- W2354890410 type Work @default.
- W2354890410 sameAs 2354890410 @default.
- W2354890410 citedByCount "0" @default.
- W2354890410 crossrefType "journal-article" @default.
- W2354890410 hasAuthorship W2354890410A5040953644 @default.
- W2354890410 hasConcept C100460472 @default.
- W2354890410 hasConcept C11171543 @default.
- W2354890410 hasConcept C111919701 @default.
- W2354890410 hasConcept C136525101 @default.
- W2354890410 hasConcept C142724271 @default.
- W2354890410 hasConcept C145667562 @default.
- W2354890410 hasConcept C154945302 @default.
- W2354890410 hasConcept C15744967 @default.
- W2354890410 hasConcept C171250308 @default.
- W2354890410 hasConcept C172707124 @default.
- W2354890410 hasConcept C192562407 @default.
- W2354890410 hasConcept C201414436 @default.
- W2354890410 hasConcept C204787440 @default.
- W2354890410 hasConcept C2779227376 @default.
- W2354890410 hasConcept C2780023022 @default.
- W2354890410 hasConcept C37977207 @default.
- W2354890410 hasConcept C41008148 @default.
- W2354890410 hasConcept C41075158 @default.
- W2354890410 hasConcept C49040817 @default.
- W2354890410 hasConcept C544956773 @default.
- W2354890410 hasConcept C71924100 @default.
- W2354890410 hasConcept C98045186 @default.
- W2354890410 hasConceptScore W2354890410C100460472 @default.
- W2354890410 hasConceptScore W2354890410C11171543 @default.
- W2354890410 hasConceptScore W2354890410C111919701 @default.
- W2354890410 hasConceptScore W2354890410C136525101 @default.
- W2354890410 hasConceptScore W2354890410C142724271 @default.
- W2354890410 hasConceptScore W2354890410C145667562 @default.
- W2354890410 hasConceptScore W2354890410C154945302 @default.
- W2354890410 hasConceptScore W2354890410C15744967 @default.
- W2354890410 hasConceptScore W2354890410C171250308 @default.
- W2354890410 hasConceptScore W2354890410C172707124 @default.
- W2354890410 hasConceptScore W2354890410C192562407 @default.
- W2354890410 hasConceptScore W2354890410C201414436 @default.
- W2354890410 hasConceptScore W2354890410C204787440 @default.
- W2354890410 hasConceptScore W2354890410C2779227376 @default.
- W2354890410 hasConceptScore W2354890410C2780023022 @default.
- W2354890410 hasConceptScore W2354890410C37977207 @default.
- W2354890410 hasConceptScore W2354890410C41008148 @default.
- W2354890410 hasConceptScore W2354890410C41075158 @default.
- W2354890410 hasConceptScore W2354890410C49040817 @default.
- W2354890410 hasConceptScore W2354890410C544956773 @default.
- W2354890410 hasConceptScore W2354890410C71924100 @default.
- W2354890410 hasConceptScore W2354890410C98045186 @default.
- W2354890410 hasLocation W23548904101 @default.
- W2354890410 hasOpenAccess W2354890410 @default.
- W2354890410 hasPrimaryLocation W23548904101 @default.
- W2354890410 hasRelatedWork W1549622921 @default.
- W2354890410 hasRelatedWork W1592323162 @default.
- W2354890410 hasRelatedWork W1995241800 @default.
- W2354890410 hasRelatedWork W2005435345 @default.
- W2354890410 hasRelatedWork W2011413853 @default.
- W2354890410 hasRelatedWork W2020571316 @default.
- W2354890410 hasRelatedWork W2032570479 @default.
- W2354890410 hasRelatedWork W2037757983 @default.
- W2354890410 hasRelatedWork W2041619183 @default.
- W2354890410 hasRelatedWork W2068565818 @default.
- W2354890410 hasRelatedWork W2079237526 @default.
- W2354890410 hasRelatedWork W2081068942 @default.
- W2354890410 hasRelatedWork W2085908435 @default.
- W2354890410 hasRelatedWork W2093882065 @default.
- W2354890410 hasRelatedWork W2154999257 @default.
- W2354890410 hasRelatedWork W2160853892 @default.
- W2354890410 hasRelatedWork W2538134487 @default.
- W2354890410 hasRelatedWork W2896191378 @default.
- W2354890410 hasRelatedWork W2853230362 @default.
- W2354890410 hasRelatedWork W2927982736 @default.
- W2354890410 isParatext "false" @default.
- W2354890410 isRetracted "false" @default.
- W2354890410 magId "2354890410" @default.
- W2354890410 workType "article" @default.