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- W2355087481 abstract "A gradient interlayer was deposited on stainless steel disk and silicon wafer by RF-CVD assisted sputtering and reactive sputtering method. Sequentially,a Si-DLC film was deposited on the interlayer by RF-CVD. The effect of the interlayer on the characteristics and tribological behaviors in water of the film was investigated. The results show that the presence of the gradient interlayer increased the content of sp3 carbons as well as the hardness and the Young's Modulus of Si-DLC slightly. The Si-DLC film with gradient interlayer showed higher failure-resistant capability comparing with the film without gradient interlayer." @default.
- W2355087481 created "2016-06-24" @default.
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- W2355087481 date "2014-01-01" @default.
- W2355087481 modified "2023-09-23" @default.
- W2355087481 title "Preparation and Tribological Properties in Water of Si-DLC Film with Gradient Interlayer Deposited by Muti-Power Source Technology" @default.
- W2355087481 hasPublicationYear "2014" @default.
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