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- W2355284804 abstract "This paper presents a new precision stage by using the PZT actuator and stepping motor. The stage have the precision positioning mechanism that has been developed for generation displacements with nanometer accuracy and a millimeter dynamic range simulatneously. The stage is composed not of the mechanical elastic hinge but of the clamp, and only one PZT actuator. The displacement of stage is acquired by the control of the two clamp between the PZT actuator. The results of the FEM analysis in the contact pali of the clamp and basic properties of the positioning system are also presented. Using the new stage proposed in this paper." @default.
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- W2355284804 date "2008-01-01" @default.
- W2355284804 modified "2023-09-24" @default.
- W2355284804 title "Development of precision-stage for the millimeter dynamic range by using the PZT actuato" @default.
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