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- W2355320461 abstract "In this paper,high quality of AZO thin films were prepared by direct current(DC) reactive magnetron sputtering using a Zn target(99.99%) containing Al of 1.5%.The obtained films were characterized and analyzed by ultraviolet-visible and infrared light spectrophotometer.The refractive index and thickness of AZO thin films were theoretically analyzed.The spectral measurements of the films indicate that the average value of the optical transmittance of the films in the visible region exceeds 80%.There is a strong absorption of AZO thin films in the ultraviolet region.The reflectance of AZO thin films in the infrared region is up to 70%.The thickness of AZO thin films is 101 nm,which coincides with the measurement results of step profiler." @default.
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- W2355320461 date "2009-01-01" @default.
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- W2355320461 title "Optical property of Al doped ZnO thin films" @default.
- W2355320461 hasPublicationYear "2009" @default.
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