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- W2355360119 abstract "Friction force is present in most microelectromechanical systems(MEMS),since they have a large surface area to volume ratio.Understanding of friction is necessary to improve the performance and reliability of MEMS.A model of electrostatic tangential force for smooth and two kinds roughness plates,which are square and pyramid asperities,was established based on the energy balance method.The factors of the microscale,superficial appearance,applied voltage,micro asperities or dents or holes needed by fabrication were considered to discuss the electrostatic tangential resistance between two charged moving plates with respect to each other.As the rate of the plate width over the gap between two plates increased or the superficial appearance factor increased,or the applied voltage increased,the electrostatic tangential resistance increased accordingly.The superficial appearance factor was directly proportional to the rate of all micro asperities projective area to the plate area,and nonlinearly increased with increase of the relative surface roughness." @default.
- W2355360119 created "2016-06-24" @default.
- W2355360119 creator A5035950793 @default.
- W2355360119 date "2008-01-01" @default.
- W2355360119 modified "2023-09-23" @default.
- W2355360119 title "Electrostatic Resistance for the Moving Plate in MEMS" @default.
- W2355360119 hasPublicationYear "2008" @default.
- W2355360119 type Work @default.
- W2355360119 sameAs 2355360119 @default.
- W2355360119 citedByCount "0" @default.
- W2355360119 crossrefType "journal-article" @default.
- W2355360119 hasAuthorship W2355360119A5035950793 @default.
- W2355360119 hasConcept C107365816 @default.
- W2355360119 hasConcept C117626034 @default.
- W2355360119 hasConcept C119599485 @default.
- W2355360119 hasConcept C120665830 @default.
- W2355360119 hasConcept C121332964 @default.
- W2355360119 hasConcept C127413603 @default.
- W2355360119 hasConcept C135692309 @default.
- W2355360119 hasConcept C136525101 @default.
- W2355360119 hasConcept C142575187 @default.
- W2355360119 hasConcept C142724271 @default.
- W2355360119 hasConcept C145420912 @default.
- W2355360119 hasConcept C159985019 @default.
- W2355360119 hasConcept C165801399 @default.
- W2355360119 hasConcept C171250308 @default.
- W2355360119 hasConcept C179428855 @default.
- W2355360119 hasConcept C192562407 @default.
- W2355360119 hasConcept C204787440 @default.
- W2355360119 hasConcept C2524010 @default.
- W2355360119 hasConcept C33923547 @default.
- W2355360119 hasConcept C37977207 @default.
- W2355360119 hasConcept C57879066 @default.
- W2355360119 hasConcept C62520636 @default.
- W2355360119 hasConcept C71039073 @default.
- W2355360119 hasConcept C71924100 @default.
- W2355360119 hasConceptScore W2355360119C107365816 @default.
- W2355360119 hasConceptScore W2355360119C117626034 @default.
- W2355360119 hasConceptScore W2355360119C119599485 @default.
- W2355360119 hasConceptScore W2355360119C120665830 @default.
- W2355360119 hasConceptScore W2355360119C121332964 @default.
- W2355360119 hasConceptScore W2355360119C127413603 @default.
- W2355360119 hasConceptScore W2355360119C135692309 @default.
- W2355360119 hasConceptScore W2355360119C136525101 @default.
- W2355360119 hasConceptScore W2355360119C142575187 @default.
- W2355360119 hasConceptScore W2355360119C142724271 @default.
- W2355360119 hasConceptScore W2355360119C145420912 @default.
- W2355360119 hasConceptScore W2355360119C159985019 @default.
- W2355360119 hasConceptScore W2355360119C165801399 @default.
- W2355360119 hasConceptScore W2355360119C171250308 @default.
- W2355360119 hasConceptScore W2355360119C179428855 @default.
- W2355360119 hasConceptScore W2355360119C192562407 @default.
- W2355360119 hasConceptScore W2355360119C204787440 @default.
- W2355360119 hasConceptScore W2355360119C2524010 @default.
- W2355360119 hasConceptScore W2355360119C33923547 @default.
- W2355360119 hasConceptScore W2355360119C37977207 @default.
- W2355360119 hasConceptScore W2355360119C57879066 @default.
- W2355360119 hasConceptScore W2355360119C62520636 @default.
- W2355360119 hasConceptScore W2355360119C71039073 @default.
- W2355360119 hasConceptScore W2355360119C71924100 @default.
- W2355360119 hasLocation W23553601191 @default.
- W2355360119 hasOpenAccess W2355360119 @default.
- W2355360119 hasPrimaryLocation W23553601191 @default.
- W2355360119 hasRelatedWork W1046052584 @default.
- W2355360119 hasRelatedWork W160357870 @default.
- W2355360119 hasRelatedWork W180210874 @default.
- W2355360119 hasRelatedWork W2017907577 @default.
- W2355360119 hasRelatedWork W2023545518 @default.
- W2355360119 hasRelatedWork W2037989250 @default.
- W2355360119 hasRelatedWork W2040927233 @default.
- W2355360119 hasRelatedWork W2045835557 @default.
- W2355360119 hasRelatedWork W2257554988 @default.
- W2355360119 hasRelatedWork W2284102221 @default.
- W2355360119 hasRelatedWork W2550219405 @default.
- W2355360119 hasRelatedWork W2608018992 @default.
- W2355360119 hasRelatedWork W2891996892 @default.
- W2355360119 hasRelatedWork W2915127048 @default.
- W2355360119 hasRelatedWork W2933150782 @default.
- W2355360119 hasRelatedWork W3020705746 @default.
- W2355360119 hasRelatedWork W3044370163 @default.
- W2355360119 hasRelatedWork W3046421501 @default.
- W2355360119 hasRelatedWork W3147488972 @default.
- W2355360119 hasRelatedWork W56762577 @default.
- W2355360119 isParatext "false" @default.
- W2355360119 isRetracted "false" @default.
- W2355360119 magId "2355360119" @default.
- W2355360119 workType "article" @default.