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- W2355373604 abstract "Micro electro-mechanical system (MEMS) is the frontier field in high science and technology towards the 21st century. Future researching content and developing tendency of MEMS are introduced." @default.
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- W2355373604 date "2006-01-01" @default.
- W2355373604 modified "2023-09-25" @default.
- W2355373604 title "Look Forward to the Future of Micro Electro-Mechanical System" @default.
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