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- W2355752479 abstract "Presented the design and fabrication of a micro electromagnetic actuator,which composed of two layers.One layer is a Parylene diaphragm with an electroplated NiFe array,the other layer is a silicon wafer with a coil on it.Analyzed the actuating character of the coil and the Parylene diaphragm,and optimize the dimension of NiFe posts.Electroplating was adopted to fabricate the coil on the silicon and the NiFe array on the Parylene diaphragm,and sacrificial layer technology was employed to release the diaphragm from the silicon wafer." @default.
- W2355752479 created "2016-06-24" @default.
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- W2355752479 date "2005-01-01" @default.
- W2355752479 modified "2023-09-26" @default.
- W2355752479 title "Design and Fabrication of Micro Electromagnetic Actuator Based on Parylene Diaphragm" @default.
- W2355752479 hasPublicationYear "2005" @default.
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