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- W2355767599 abstract "Measuring the thickness and residual strain of thermally excited microbeam resonators is important for studying their resonant characters. The thickness of microbeams was first calculated approximately by single layer beam model because the film of thermal excited microbeam resonators is far thinner than the dominant layer. With this approximate value the equivalent Young's modulus and equivalent density of thermal excited beams were obtained. Then the thickness and residual strain of a microcantilever or microbridge resonators were calculated by bilayer beam' resonance frequency. The calculated results are coincident with the experimental value. This method has the advantages of nondestructive." @default.
- W2355767599 created "2016-06-24" @default.
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- W2355767599 date "2003-01-01" @default.
- W2355767599 modified "2023-09-27" @default.
- W2355767599 title "Determining the Thickness and Residual Strain of Thermally Excited Microbeam Resonators by Resonance Frequency" @default.
- W2355767599 hasPublicationYear "2003" @default.
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