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- W2355872573 abstract "In the fields of spaceflight, national defence, medicine, nuclear physics equipments and devices tend to be miniaturization, complication and integration. Under these requirement's many microparts and devices were fabricated by using precision mechanic fabrication technology, LIGA process and silicon fabrication technology. For the complicated micromechanic electric system it is still very difficult to produce them directly with above technologies. The micro assembling technology should be used. The microclamp is developed to meet this need . In addition cell operation and other microsize operation will benifit from such kind of parts. We have been doing some clamp research work with LIGA technology and have gotten results." @default.
- W2355872573 created "2016-06-24" @default.
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- W2355872573 date "1999-01-01" @default.
- W2355872573 modified "2023-09-25" @default.
- W2355872573 title "Fabrication of Microclamp Using LIGA Technology" @default.
- W2355872573 hasPublicationYear "1999" @default.
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