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- W2356014777 abstract "According to the characteristic of micro electro mechanical systems(MEMS) fabrication technology and the design requirements for the initial position latch mechanism,two MEMS initial position latch mechanisms were designed.By mechanical analysis,the calculation formular of resistance that the initial position latch mechanism needed to overcome was determined,which was validated by ANSYS simu￣lation.According to the balance principle between satisfaction of the system requirements and feasibility of assembly,the two MEMS initial position latch mechanisms were compared and the resistance reduction MEMS initial position latch mechanism was chosen.The MEMS initial position latch mechanism was fabricated with LIGA technology which was one of the MEMS fabrication technology.The centrifugal tests were carried by VDS92-1430 centrifugal tester which was accelerated to 3 000,5 000,8 000 and 12 000 r/min respectively.The test result shows that the designed MEMS initial position latch mechanism can work properly and meets the design requirement." @default.
- W2356014777 created "2016-06-24" @default.
- W2356014777 creator A5022200044 @default.
- W2356014777 date "2009-01-01" @default.
- W2356014777 modified "2023-09-22" @default.
- W2356014777 title "Design and Performance Analysis of a Resistance Reduction MEMS Initial Position Latch Mechanism" @default.
- W2356014777 hasPublicationYear "2009" @default.
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