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- W2356554573 abstract "Characteristics of pulse-modulated capacitive coupling plasmas in SiH4/C2H4/Ar gas mixture were diagnosed by optical emission spectroscopy.The electron excitation temperature of plasmas was calculated with the five Ar emission spectral lines by Boltzmann slope method.Then,the dependence of the excitation temperature and relative emission intensity on the discharge power,duty cycle,modulation frequency and gas pressure were presented." @default.
- W2356554573 created "2016-06-24" @default.
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- W2356554573 date "2011-01-01" @default.
- W2356554573 modified "2023-09-23" @default.
- W2356554573 title "Optical emission spectrometry diagnosis of pulse-modulated RF capacitive coupling discharge in SiH_4/C_2H_4/Ar" @default.
- W2356554573 hasPublicationYear "2011" @default.
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