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- W2356743485 abstract "The excitation is one of the essential techniques for dynamic characteristic testing of MEMS microstructure.The function of the excitation is used to make microstructures vibrate,and then the dynamic characteristics of the microstructure can be extracted by analysis of the response signal.The size of microstructure is quite small,and the resonance frequency is much higher than macro structures.Therefore,the traditional excitation methods are not suitable for MEMS dynamic testing and can not be applied without modification.According to the excitation modes,the excitation techniques used in dynamic characteristics testing for MEMS microstructures can be classified as three categories,i.e.excitation by external field energy,integration of excitation element on the microstructure,and base excitation.The excitation principles and characteristics of the methods including acoustic excitation,electrostatic excitation,magnetic excitation,electric thermal heating,photo thermal excitation,and piezoelectric excitation are introduced.The applicability and limitation of the above mentioned methods are also compared and analyzed." @default.
- W2356743485 created "2016-06-24" @default.
- W2356743485 creator A5082472366 @default.
- W2356743485 date "2008-01-01" @default.
- W2356743485 modified "2023-09-26" @default.
- W2356743485 title "Excitation Techniques for Testing of Dynamic Characteristics of MEMS Microstructure" @default.
- W2356743485 hasPublicationYear "2008" @default.
- W2356743485 type Work @default.
- W2356743485 sameAs 2356743485 @default.
- W2356743485 citedByCount "0" @default.
- W2356743485 crossrefType "journal-article" @default.
- W2356743485 hasAuthorship W2356743485A5082472366 @default.
- W2356743485 hasConcept C119599485 @default.
- W2356743485 hasConcept C121332964 @default.
- W2356743485 hasConcept C127413603 @default.
- W2356743485 hasConcept C159985019 @default.
- W2356743485 hasConcept C192562407 @default.
- W2356743485 hasConcept C198824145 @default.
- W2356743485 hasConcept C24890656 @default.
- W2356743485 hasConcept C37977207 @default.
- W2356743485 hasConcept C46141821 @default.
- W2356743485 hasConcept C49040817 @default.
- W2356743485 hasConcept C66938386 @default.
- W2356743485 hasConcept C83581075 @default.
- W2356743485 hasConcept C87976508 @default.
- W2356743485 hasConceptScore W2356743485C119599485 @default.
- W2356743485 hasConceptScore W2356743485C121332964 @default.
- W2356743485 hasConceptScore W2356743485C127413603 @default.
- W2356743485 hasConceptScore W2356743485C159985019 @default.
- W2356743485 hasConceptScore W2356743485C192562407 @default.
- W2356743485 hasConceptScore W2356743485C198824145 @default.
- W2356743485 hasConceptScore W2356743485C24890656 @default.
- W2356743485 hasConceptScore W2356743485C37977207 @default.
- W2356743485 hasConceptScore W2356743485C46141821 @default.
- W2356743485 hasConceptScore W2356743485C49040817 @default.
- W2356743485 hasConceptScore W2356743485C66938386 @default.
- W2356743485 hasConceptScore W2356743485C83581075 @default.
- W2356743485 hasConceptScore W2356743485C87976508 @default.
- W2356743485 hasLocation W23567434851 @default.
- W2356743485 hasOpenAccess W2356743485 @default.
- W2356743485 hasPrimaryLocation W23567434851 @default.
- W2356743485 hasRelatedWork W1987171961 @default.
- W2356743485 hasRelatedWork W1991488708 @default.
- W2356743485 hasRelatedWork W2005812155 @default.
- W2356743485 hasRelatedWork W2038350047 @default.
- W2356743485 hasRelatedWork W2050644469 @default.
- W2356743485 hasRelatedWork W2064907759 @default.
- W2356743485 hasRelatedWork W2076982143 @default.
- W2356743485 hasRelatedWork W2097408646 @default.
- W2356743485 hasRelatedWork W2342013759 @default.
- W2356743485 hasRelatedWork W2401710251 @default.
- W2356743485 hasRelatedWork W2528217595 @default.
- W2356743485 hasRelatedWork W2732267396 @default.
- W2356743485 hasRelatedWork W2896170328 @default.
- W2356743485 hasRelatedWork W2942384146 @default.
- W2356743485 hasRelatedWork W3045646696 @default.
- W2356743485 hasRelatedWork W3118850106 @default.
- W2356743485 hasRelatedWork W3194234272 @default.
- W2356743485 hasRelatedWork W3198710469 @default.
- W2356743485 hasRelatedWork W1950021816 @default.
- W2356743485 hasRelatedWork W2595173151 @default.
- W2356743485 isParatext "false" @default.
- W2356743485 isRetracted "false" @default.
- W2356743485 magId "2356743485" @default.
- W2356743485 workType "article" @default.