Matches in SemOpenAlex for { <https://semopenalex.org/work/W2356790273> ?p ?o ?g. }
Showing items 1 to 77 of
77
with 100 items per page.
- W2356790273 abstract "In magnetron sputtering,higher deposition rate could be helpful to deposit metal films of higher purity within shorter deposition time.Target with higher deposition efficiency could deposit more wafers.A sputtering model was developed.The effects of grain orientation and grain size of planar targets on sputtering rate,deposition rate and deposition efficiency were also investigated.The results of experiments showed that sputtering rates increased with the increase of the free atom surface density(FASD) of targets,but sputtering rates could not be too high or too low for FASD of targets changed only in a limit range.Deposition efficiency and deposition rate were influenced by proportion of grain planes of targets because atomic dense directions above grain planes determined how many atoms could deposit on the substrate." @default.
- W2356790273 created "2016-06-24" @default.
- W2356790273 creator A5079821367 @default.
- W2356790273 date "2009-01-01" @default.
- W2356790273 modified "2023-09-23" @default.
- W2356790273 title "Effects of Target Microstructure on Al-Cu Alloy Sputtering and Depositing Performance" @default.
- W2356790273 hasPublicationYear "2009" @default.
- W2356790273 type Work @default.
- W2356790273 sameAs 2356790273 @default.
- W2356790273 citedByCount "0" @default.
- W2356790273 crossrefType "journal-article" @default.
- W2356790273 hasAuthorship W2356790273A5079821367 @default.
- W2356790273 hasConcept C111368507 @default.
- W2356790273 hasConcept C113196181 @default.
- W2356790273 hasConcept C127313418 @default.
- W2356790273 hasConcept C151730666 @default.
- W2356790273 hasConcept C160671074 @default.
- W2356790273 hasConcept C171250308 @default.
- W2356790273 hasConcept C185592680 @default.
- W2356790273 hasConcept C19067145 @default.
- W2356790273 hasConcept C191897082 @default.
- W2356790273 hasConcept C192191005 @default.
- W2356790273 hasConcept C192562407 @default.
- W2356790273 hasConcept C22423302 @default.
- W2356790273 hasConcept C2777289219 @default.
- W2356790273 hasConcept C2780026712 @default.
- W2356790273 hasConcept C2816523 @default.
- W2356790273 hasConcept C43617362 @default.
- W2356790273 hasConcept C49040817 @default.
- W2356790273 hasConcept C61427134 @default.
- W2356790273 hasConcept C64297162 @default.
- W2356790273 hasConcept C87976508 @default.
- W2356790273 hasConceptScore W2356790273C111368507 @default.
- W2356790273 hasConceptScore W2356790273C113196181 @default.
- W2356790273 hasConceptScore W2356790273C127313418 @default.
- W2356790273 hasConceptScore W2356790273C151730666 @default.
- W2356790273 hasConceptScore W2356790273C160671074 @default.
- W2356790273 hasConceptScore W2356790273C171250308 @default.
- W2356790273 hasConceptScore W2356790273C185592680 @default.
- W2356790273 hasConceptScore W2356790273C19067145 @default.
- W2356790273 hasConceptScore W2356790273C191897082 @default.
- W2356790273 hasConceptScore W2356790273C192191005 @default.
- W2356790273 hasConceptScore W2356790273C192562407 @default.
- W2356790273 hasConceptScore W2356790273C22423302 @default.
- W2356790273 hasConceptScore W2356790273C2777289219 @default.
- W2356790273 hasConceptScore W2356790273C2780026712 @default.
- W2356790273 hasConceptScore W2356790273C2816523 @default.
- W2356790273 hasConceptScore W2356790273C43617362 @default.
- W2356790273 hasConceptScore W2356790273C49040817 @default.
- W2356790273 hasConceptScore W2356790273C61427134 @default.
- W2356790273 hasConceptScore W2356790273C64297162 @default.
- W2356790273 hasConceptScore W2356790273C87976508 @default.
- W2356790273 hasOpenAccess W2356790273 @default.
- W2356790273 hasRelatedWork W1978878707 @default.
- W2356790273 hasRelatedWork W1993795891 @default.
- W2356790273 hasRelatedWork W2017571393 @default.
- W2356790273 hasRelatedWork W2045153511 @default.
- W2356790273 hasRelatedWork W2067060210 @default.
- W2356790273 hasRelatedWork W2074910360 @default.
- W2356790273 hasRelatedWork W2086176167 @default.
- W2356790273 hasRelatedWork W2088763517 @default.
- W2356790273 hasRelatedWork W2137168552 @default.
- W2356790273 hasRelatedWork W2313910662 @default.
- W2356790273 hasRelatedWork W2356916913 @default.
- W2356790273 hasRelatedWork W2369978195 @default.
- W2356790273 hasRelatedWork W2375193950 @default.
- W2356790273 hasRelatedWork W2388714392 @default.
- W2356790273 hasRelatedWork W2390027294 @default.
- W2356790273 hasRelatedWork W2580745936 @default.
- W2356790273 hasRelatedWork W2599660398 @default.
- W2356790273 hasRelatedWork W2781263598 @default.
- W2356790273 hasRelatedWork W2885006165 @default.
- W2356790273 hasRelatedWork W906071939 @default.
- W2356790273 isParatext "false" @default.
- W2356790273 isRetracted "false" @default.
- W2356790273 magId "2356790273" @default.
- W2356790273 workType "article" @default.