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- W2357085732 abstract "The(Ba0.65Sr0.35)TiO3 ferroelectric thin film deposited on Si and Pt/TiO2/SiO2/Si substrates by radio frequency magnetron sputtering had been investigated focusing on the microstructure and dielectric properties.The experiment results showed that the BST thin films deposited on substrates at 550 ℃ in an work ambient pressure of 2.0 Pa formed perfect perovskite structure.The BST thin film deposited on Pt substrate was more evenly distribution and the surface was more smooth than that on Si substrate.The dielectric constant and dissipation factor for(Ba0.65Sr0.35)TiO3 thin film at room temperature and a frequency of 100 kHz were 353.8 and 0.012 8,respectively.According to the permittivity-temperature curve,the Curie temperature of the BST ferroelectric thin film was about 5 ℃." @default.
- W2357085732 created "2016-06-24" @default.
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- W2357085732 date "2007-01-01" @default.
- W2357085732 modified "2023-09-23" @default.
- W2357085732 title "Study on(Ba_(0.65)Sr_(0.35))TiO_3 Ferroelectric Thin Film Prepared by RF Magnetron Sputtering" @default.
- W2357085732 hasPublicationYear "2007" @default.
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