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- W2357161738 abstract "The two island-beam-diaphragm structure sensor was adopted.The range of the sensor is 200 Pa.So the sensor can measure the micro-pressure.Relative theoretical analysis and calculation was carried out.The width and length of the resistors were researched,which provided important scientific basis for Wheatstone bridge design.Through the finite element method software,the temperature simulation of the sensor was taken.The work temperature range was explored.Finally it analyzed the chip size of the sensor,found out that as the film's size increased and its thickness decreased,stress force over the film increased,while the deflection also increased,that is,the sensitivity increased while linearity decreased." @default.
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- W2357161738 date "2011-01-01" @default.
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- W2357161738 title "Design and Temperature Analysis of Pressure Sensor" @default.
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