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- W2357183851 abstract "Ion beam induced charge technique (IBIC) with low beam current (fA level) and high efficiency is a new development of nuclear microscopy. It has been widely applied to the fields of semiconductor and microelectronical materials. The principle and the experimental method of the IBIC technique were described and reviewed its status and new trends were reviewed." @default.
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- W2357183851 date "2002-01-01" @default.
- W2357183851 modified "2023-09-25" @default.
- W2357183851 title "The status and new trends of ion beam induced charge technique" @default.
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