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- W2357357685 abstract "The paper describes VO x thin films deposited on substrates of quartz glass and Si (100) by reactive ion-beam sputtering followed by post annealing, and fabrication of 8-element VO x linear uncooled microbolometer array. SEM and XRD indicate that the films are smooth compact surface morphology with needle like grain and poly-crystal structure of mixed vanadium oxides, and the characterization of the detectors shows that the detectors realize uncooled infrared detection in the spectrum region of 8～12 μm as well." @default.
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- W2357357685 date "2001-01-01" @default.
- W2357357685 modified "2023-09-25" @default.
- W2357357685 title "Fabrication of 8-element Linear VO_x Uncooled Microbolometer IR Detector Array" @default.
- W2357357685 hasPublicationYear "2001" @default.
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