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- W2358250620 abstract "The microfluidic sensor based on the silicon is fabricated with the microelectronic technique and micromechanical process, including micro-heater and temperature sensor. Under the operational mode of constant heating power, the characters of microfluidic sensor are analyzed in this paper. The experimental results indicate that the measurement range of microfluidic sensor is about from 10 μL/min to 800 μl/min." @default.
- W2358250620 created "2016-06-24" @default.
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- W2358250620 date "2004-01-01" @default.
- W2358250620 modified "2023-09-24" @default.
- W2358250620 title "The Study on the Thermal Microfluidic Sensor Based on Silicon" @default.
- W2358250620 hasPublicationYear "2004" @default.
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