Matches in SemOpenAlex for { <https://semopenalex.org/work/W2358706977> ?p ?o ?g. }
Showing items 1 to 51 of
51
with 100 items per page.
- W2358706977 abstract "A review of step height metrology techniques used in nanotechnology applications is presented. The analysis methods, algorithms and error sources encountered in step height metrology are outlined. Results showing some variations that occur when different algorithms are used are presented, and best practice procedures for accurate step height metrology are described." @default.
- W2358706977 created "2016-06-24" @default.
- W2358706977 creator A5046451500 @default.
- W2358706977 date "2004-01-01" @default.
- W2358706977 modified "2023-09-25" @default.
- W2358706977 title "Step Height Metrology Techniques" @default.
- W2358706977 hasPublicationYear "2004" @default.
- W2358706977 type Work @default.
- W2358706977 sameAs 2358706977 @default.
- W2358706977 citedByCount "0" @default.
- W2358706977 crossrefType "journal-article" @default.
- W2358706977 hasAuthorship W2358706977A5046451500 @default.
- W2358706977 hasConcept C120665830 @default.
- W2358706977 hasConcept C121332964 @default.
- W2358706977 hasConcept C127413603 @default.
- W2358706977 hasConcept C165880335 @default.
- W2358706977 hasConcept C195766429 @default.
- W2358706977 hasConcept C41008148 @default.
- W2358706977 hasConceptScore W2358706977C120665830 @default.
- W2358706977 hasConceptScore W2358706977C121332964 @default.
- W2358706977 hasConceptScore W2358706977C127413603 @default.
- W2358706977 hasConceptScore W2358706977C165880335 @default.
- W2358706977 hasConceptScore W2358706977C195766429 @default.
- W2358706977 hasConceptScore W2358706977C41008148 @default.
- W2358706977 hasLocation W23587069771 @default.
- W2358706977 hasOpenAccess W2358706977 @default.
- W2358706977 hasPrimaryLocation W23587069771 @default.
- W2358706977 hasRelatedWork W1545249500 @default.
- W2358706977 hasRelatedWork W1986250179 @default.
- W2358706977 hasRelatedWork W1995843189 @default.
- W2358706977 hasRelatedWork W2004368821 @default.
- W2358706977 hasRelatedWork W2009077838 @default.
- W2358706977 hasRelatedWork W2018745466 @default.
- W2358706977 hasRelatedWork W2024563117 @default.
- W2358706977 hasRelatedWork W2064999352 @default.
- W2358706977 hasRelatedWork W2075553306 @default.
- W2358706977 hasRelatedWork W2084955675 @default.
- W2358706977 hasRelatedWork W2087246404 @default.
- W2358706977 hasRelatedWork W2332596632 @default.
- W2358706977 hasRelatedWork W2508254294 @default.
- W2358706977 hasRelatedWork W2731187718 @default.
- W2358706977 hasRelatedWork W2948389746 @default.
- W2358706977 hasRelatedWork W3198951119 @default.
- W2358706977 hasRelatedWork W2756781689 @default.
- W2358706977 hasRelatedWork W2884002252 @default.
- W2358706977 hasRelatedWork W2956926406 @default.
- W2358706977 hasRelatedWork W3171883949 @default.
- W2358706977 isParatext "false" @default.
- W2358706977 isRetracted "false" @default.
- W2358706977 magId "2358706977" @default.
- W2358706977 workType "article" @default.