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- W2358738602 abstract "The Langmuir probe and optical emission spectroscopy(OES) were used to analyze the characteristics of the argon plasma generated in the plasma polishing apparatus.The electron temperature and electron density of the argon plasma were calculated according to the results measured by Langmuir probe and using bispectral analysis respectively.The result shows that when the RF power changed from 40 W to 120 W,the electron temperature increased with the increment of RF power,ranging from 2.41 eV to 5.03 eV.The plasma temperature changed little with variant RF power.The electron density calculated using OES deviated slightly from that by the Langmuir probe diagnosis,but with the same changing trend." @default.
- W2358738602 created "2016-06-24" @default.
- W2358738602 creator A5055916281 @default.
- W2358738602 date "2011-01-01" @default.
- W2358738602 modified "2023-09-23" @default.
- W2358738602 title "Characteristics of RF-generated Argon Plasma" @default.
- W2358738602 hasPublicationYear "2011" @default.
- W2358738602 type Work @default.
- W2358738602 sameAs 2358738602 @default.
- W2358738602 citedByCount "0" @default.
- W2358738602 crossrefType "journal-article" @default.
- W2358738602 hasAuthorship W2358738602A5055916281 @default.
- W2358738602 hasConcept C121332964 @default.
- W2358738602 hasConcept C125485243 @default.
- W2358738602 hasConcept C147120987 @default.
- W2358738602 hasConcept C176118016 @default.
- W2358738602 hasConcept C184779094 @default.
- W2358738602 hasConcept C192039680 @default.
- W2358738602 hasConcept C192562407 @default.
- W2358738602 hasConcept C196009443 @default.
- W2358738602 hasConcept C22175881 @default.
- W2358738602 hasConcept C32891209 @default.
- W2358738602 hasConcept C43503373 @default.
- W2358738602 hasConcept C547737533 @default.
- W2358738602 hasConcept C62520636 @default.
- W2358738602 hasConcept C82706917 @default.
- W2358738602 hasConcept C95974651 @default.
- W2358738602 hasConceptScore W2358738602C121332964 @default.
- W2358738602 hasConceptScore W2358738602C125485243 @default.
- W2358738602 hasConceptScore W2358738602C147120987 @default.
- W2358738602 hasConceptScore W2358738602C176118016 @default.
- W2358738602 hasConceptScore W2358738602C184779094 @default.
- W2358738602 hasConceptScore W2358738602C192039680 @default.
- W2358738602 hasConceptScore W2358738602C192562407 @default.
- W2358738602 hasConceptScore W2358738602C196009443 @default.
- W2358738602 hasConceptScore W2358738602C22175881 @default.
- W2358738602 hasConceptScore W2358738602C32891209 @default.
- W2358738602 hasConceptScore W2358738602C43503373 @default.
- W2358738602 hasConceptScore W2358738602C547737533 @default.
- W2358738602 hasConceptScore W2358738602C62520636 @default.
- W2358738602 hasConceptScore W2358738602C82706917 @default.
- W2358738602 hasConceptScore W2358738602C95974651 @default.
- W2358738602 hasLocation W23587386021 @default.
- W2358738602 hasOpenAccess W2358738602 @default.
- W2358738602 hasPrimaryLocation W23587386021 @default.
- W2358738602 hasRelatedWork W1820393622 @default.
- W2358738602 hasRelatedWork W1964054907 @default.
- W2358738602 hasRelatedWork W2018487440 @default.
- W2358738602 hasRelatedWork W2020557462 @default.
- W2358738602 hasRelatedWork W2024658689 @default.
- W2358738602 hasRelatedWork W2029262103 @default.
- W2358738602 hasRelatedWork W2067229248 @default.
- W2358738602 hasRelatedWork W2068280573 @default.
- W2358738602 hasRelatedWork W2105263956 @default.
- W2358738602 hasRelatedWork W2201257818 @default.
- W2358738602 hasRelatedWork W2335578381 @default.
- W2358738602 hasRelatedWork W2362799268 @default.
- W2358738602 hasRelatedWork W2367686686 @default.
- W2358738602 hasRelatedWork W2729909080 @default.
- W2358738602 hasRelatedWork W2782303278 @default.
- W2358738602 hasRelatedWork W2800002082 @default.
- W2358738602 hasRelatedWork W2941402842 @default.
- W2358738602 hasRelatedWork W3112710852 @default.
- W2358738602 hasRelatedWork W3113271169 @default.
- W2358738602 hasRelatedWork W2552419782 @default.
- W2358738602 isParatext "false" @default.
- W2358738602 isRetracted "false" @default.
- W2358738602 magId "2358738602" @default.
- W2358738602 workType "article" @default.